Enhanced Photocatalytic Activity of TiO2 Thin Film Deposited by Reactive RF Sputtering under Oxygen-Rich Conditions

TiO2 thin films are promising as photocatalysts to decompose organic compounds. In this study, were deposited by reactive radio-frequency (RF) magnetron sputtering under various flow rates of oxygen and argon gas. The results show that the photocatalytic activity decreases oxygen-gas ratio is increased 30% or less, while increases oxygen-rich conditions. It was observed crystal structure changed from anatase a composite rutile, where during RF more than 40%. Interestingly, vacancy concentration conditions, sample prepared most enriched condition, 70%, among our experiments exhibited highest activity. Both vacancies rutile in conditions considered responsible for enhanced photocatalysis.